Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning

By Yuen Kuan Yong, Sumeet S. Aphale, S. O. Reza Moheimani. IEEE transactions on nanotechnology, 2009

386 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f9a1ec087805346b50342f09593df2517dabeeec

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. S. O. Reza Moheimani
2. Bharath Bhikkaji
3. Brian J. Kenton
4. I. A. Mahmood
5. Kam K. Leang
6. Andrew J. Fleming
7. Chun-Yi Su
8. Guoying Gu

In Control and Systems Engineering

1. S. O. Reza Moheimani
2. Bharath Bhikkaji
3. Brian J. Kenton
4. I. A. Mahmood
5. Kam K. Leang
6. Andrew J. Fleming
7. Chun-Yi Su
8. Limin Zhu

In Electrical and Electronic Engineering

1. S. O. Reza Moheimani
2. Kam K. Leang
3. Bharath Bhikkaji
4. Brian J. Kenton
5. Andrew J. Fleming

Citations in the corpus

• Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner (2012, background): “Designs that involve mechanical amplification have been implemented to increase range without having to increase the actuator’s length [10], [13].”
• A New Scanning Method for Fast Atomic Force Microscopy (2011, background): “Although, flexure-based nanopositioners [5], [6] have emerged as an alternative to piezoelectric tubes, the latter is still the most widely used nanopositioning technology in AFMs.”