Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators

By Gavin K. Ho, Reza Abdolvand, Abhishek Sivapurapu, S. Humad, Farrokh Ayazi. Journal of microelectromechanical systems, 2008

207 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4e145e265e0baca7b701538a863b797a971d74a6

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

In Biomedical Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

In Electrical and Electronic Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

Citations in the corpus

• MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “For piezoelectrically transduced devices, thin-film piezoelectric on silicon (TPoS) platform is a commonly used process to fabricate the piezoelectric MEMS resonators [11], [85], [115], [116].”