MEMS technology for timing and frequency control
By C. T. Nguyen. Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005., 2005
241 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/ff8f36821493d8d25389124f7e58f3bc811ab287
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- High $Q$ -Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment (2008, background): “Electrostatic excitation, widely used in high-frequency resonators [13], [14] and microfabricated vibratory gyroscopes [15], is not suitable, because the required submicrometer air gaps result in unwanted squeezed film damping and might be clogged in an environmental sensing application.”
- Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “Recent developments in MEMS technology have created great commercial potentials for micromechanical resonators [71] and nanoelectromechanical oscillators [72] for timing and frequency control, micro fuel cells as power sources for portable electronic devices [73, 74], microneedles for transdermal dr”