In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

By Brandon Harrington, Reza Abdolvand. 2011

165 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/35b7973c3dd4af60482d4a3162fc1cd867b183d1