Series-resonant VHF micromechanical resonator reference oscillators

By Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Z. Ren, C. T. Nguyen. IEEE Journal of Solid-State Circuits, 2004

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Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010, result): “Furthermore, compared with the architecture in [ 24 ], this voltage-controlled amplifier exhibits a very large range of achievable gains (up to an 80-dB range).”
MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “to increase the input power, which requires the resonators to have high power handling capability [1], [179].”
MEMS technology for timing and frequency control (2005, background): “It also reduces the vibration amplitude of the resonator and, hence, reduces noise aliasing through nonlinearity in its capacitive transducer, which then reduces 1/f3 noise [12], [49].”
Dissipation in nanoelectromechanical systems (2014, background): “(a) Magnetomotive [105], and (b) for capacitive [106] and piezoelectric [107] drive and detection methods.”
Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators (2009, methodology): “Im and Zm represent the motional current and the electrical equivalent impedance of each of the resonators, respectively, which are given by [ 21 ]”