Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

By Gianluca Piazza, Philip Stephanou. Journal of microelectromechanical systems, 2006

611 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d221615ca66e19c40690bdb15928da036f3a4e6a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Songbin Gong
2. Gianluca Piazza
3. Michael L. Roukes
4. E. Myers
5. J. Arlett
6. A. Pisano
7. Wen Chen
8. Jinghui Xu

In Biomedical Engineering

1. Songbin Gong
2. Gianluca Piazza
3. Michael L. Roukes
4. E. Myers
5. J. Arlett
6. A. Pisano
7. Wen Chen
8. Jinghui Xu

In Electrical and Electronic Engineering

1. Songbin Gong
2. Gianluca Piazza
3. Michael L. Roukes
4. E. Myers
5. J. Arlett
6. A. Pisano
7. Wen Chen
8. Jinghui Xu

Citations in the corpus

• Comparative advantages of mechanical biosensors (2011, methodology): “Piezoelectric actuation has also been used extensively for MEMS devices in both ai”
• Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics (2012, methodology): “Because of its large piezoelectric coefficient, AlN has been widely utilized in high-performance electromechanical devices including thin-film bulk acoustic wave resonators, contour-mode resonators [15] and Lamb wave resonators [16].”
• One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing (2007, methodology): “For example, a completely electroded surface, such as the one adopted for plates and rings [6], yields the lowest possible motional resistance and higher electromechanical strength for the fundamental mode over spurious inharmonic resonances, but theoretically limits kt(2) to about 88 % of its maxim”
• In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators (2011, background): “Designs with this mode of anchor loss, such as lateral–extensional resonators, have relied on onequarter acoustic wavelength tether lengths to reduce effective anchor loss based on the assumption that the substrate is an ideal fixed boundary [28, 33].”
• Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering (2013, methodology): “Width-extensional mode resonators, which have lithographically defined resonances and can cover multiple frequencies on the same wafer, have also been demonstrated using AlN thin films [4].”
• MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “HighT uses thin-film AlN on silicon piezoelectric MEMS resonators, which has low Rm of around 100 Ohm.”