Stiffness-compensated temperature-insensitive micromechanical resonators

By W. Hsu, C. T. Nguyen. Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2002

134 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6840365462d16c57276704989c0c30f6e22ca7d4

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. C. T. Nguyen
2. Thomas W. Kenny
3. Saurabh A. Chandorkar
4. R. Melamud
5. Robert Puers
6. J.T.M. van Beek
7. J. Salvia
8. Yu-Wei Lin

In Biomedical Engineering

1. C. T. Nguyen
2. Thomas W. Kenny
3. Robert Puers
4. J.T.M. van Beek
5. Saurabh A. Chandorkar
6. R. Melamud
7. J. Salvia
8. Scott F. Lord

In Electrical and Electronic Engineering

1. C. T. Nguyen
2. Thomas W. Kenny
3. R. Melamud
4. Saurabh A. Chandorkar
5. Robert Puers
6. J.T.M. van Beek
7. J. Salvia
8. Yu-Wei Lin

Citations in the corpus

• MEMS technology for timing and frequency control (2005, background): “In addition to better Q, capacitive transduction also offers more flexible geometries with CAD-definable frequencies, voltage-controlled reconfigurability [28], [29], voltage-controlled frequency tunability [30] (that dwindles as frequencies go higher [22]), better thermal stability [8], material co”
• Series-resonant VHF micromechanical resonator reference oscillators (2004, background): “…series resistance, substrate coupling, and parasitic capacitance, end up limiting the s of electrical resonators to values much smaller than those exhibited by vibrating mechanical counterparts, such as quartz crystals, for which losses through gas damping and intrinsic material damping comprise…”
• MEMS technology for timing and frequency control (2005, background): “75×10(13) [3], temperature stability better than 18 ppm over 25 to 125C [5], and aging stabilities better than 2 ppm over 1 year [6][7].”
• A review of MEMS oscillators for frequency reference and timing applications (2011, background): “2 [202] Impedance loading + E modulus engineering 20 100 0.”
• Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010, background): “Many compensation schemes were proposed in the past to improve the temperature stability of MEMS resonators, including the use of electrostatic forces [4], alternative materials [5], stresses [6], or variable gaps [7] to correct for temperature effects, but few achieve frequency stability below 1 pp”