A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation

By Mohammad Ibrahim Younis, Ali H. Nayfeh. 2003

544 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f0895aa1d4cc867c15a3f0b58c63ef6f19bca206

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “In [16] perturbation techniques are employed to study primary resonances.”
Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation (2007, methodology): “Examples of this excitation in MEMS can be found in various applications, such as resonant sensors [4] and RF filters [2].”
Chaos prediction and control in MEMS resonators (2010, background): “A great deal of research has been performed to report various nonlinear dynamic phenomena such as bending of the frequency–response curve and jump phenomenon in MEMS resonators [5–7].”
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “In 2002, Abdel-Rahman, Nayfeh, and Younis presented the first of several early, purely-theoretical works detailing the nonlinear behavior of electrostatically-actuated microbeams [83– 87].”
Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators (2005, background): “The relative significance of this nonlinear term depends on the geometry of the structure as well as the residual stress present in the plate [ 11 ], [12].”
Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators (2011, background): “folded suspension architecture, designers opt to use comb drive (CD) actuators rather than parallel-plate ones [3] and prefer inextensional springs rather than extensional springs [ 4 ] for further suppression of nonlinearities.”
Nonlinear damping in a micromechanical oscillator (2009, methodology): “Finally, we propose and analyze a continuum mechanics model of our micromechanical oscillator as a planar, weakly nonlinear strongly pre-tensioned, viscoelastic beam-string [70].”