Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators

By Amro M. Elshurafa, K. Khirallah, Hani H. Tawfik, Ahmed Emira, Ahmed K. S. Abdel Aziz, Sherif Sedky. Journal of microelectromechanical systems, 2011

146 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/5cb52b24aa172d7a043f618068e2dbd9c5038df9