Review of modeling electrostatically actuated microelectromechanical systems
By Romesh C. Batra, Maurizio Porfiri, Davide Spinello. 2007
303 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/f7f4d3db62d77d5a8aa2a2c68272783cf28bec35
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
- Romesh C. Batra
- Maurizio Porfiri
- Davide Spinello
- Steven W. Shaw
- Kimberly L. Turner
- Jeffrey F. Rhoads
- Kalpataru Das
In Electrical and Electronic Engineering
- Romesh C. Batra
- Maurizio Porfiri
- Davide Spinello
- Steven W. Shaw
- Kimberly L. Turner
- Jeffrey F. Rhoads
- Kalpataru Das
Citations in the corpus
- Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “Reviews of system modeling in the presence mechanical and electrostatic interactions, incorporating quite extensive reference lists, can be found in [29, 30].”
- REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, background): “We denote the inner product between two vectors as a b; the space T has the natural inner product, see for example Batra (2005), defined by F G 1⁄4 trðFGÞ 1⁄4 P i;jF ijGij.”
- Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems (2009, unknown): “The modeling of electrically actuated MEMS has been reviewed in [34].”