Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation

By Wenming Zhang, Guang Meng. IEEE Sensors Journal, 2007

135 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0f12bf85a3b2c91549437d7e4722b43e10f52aeb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Steven W. Shaw
2. Kimberly L. Turner
3. Jeffrey F. Rhoads

In Biomedical Engineering

1. Steven W. Shaw
2. Kimberly L. Turner
3. Jeffrey F. Rhoads

In Electrical and Electronic Engineering

1. Steven W. Shaw
2. Kimberly L. Turner
3. Jeffrey F. Rhoads

Citations in the corpus

• Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “As detailed in later sections, the combined excitation of electrostatically-actuated microbeams has been studied more recently by Zhang and Meng [152, 153].”
• Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators (2011, background): “As a final note to this section, we draw the attention of the reader that the excitation term in (20) can be expanded by a Taylor series and then truncate the series to a third-order series only [i.e., O(x 3 )] [ 39 ].”