Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators

By Gregory N. Nielson, George Barbastathis. Journal of microelectromechanical systems, 2005

161 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/26633f2939eb8a4368be076f0cdc7c026f593e7f

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. S. Holmstrom
2. Hakan Urey
3. U. Baran

In Electrical and Electronic Engineering

1. S. Holmstrom
2. Hakan Urey
3. U. Baran

Citations in the corpus

• MEMS Laser Scanners: A Review (2014, background): “The pull-in problem is treated in detail in [57] and [58].”