Dissipation in nanoelectromechanical systems

By M. Imboden, P. Mohanty. 2014

259 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4e999263928b65c07926ea5880d06febca16cf6f

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In Electrical and Electronic Engineering

1. J. Foord

Citations in the corpus

• Chemical mechanical polishing of thin film diamond (2013, background): “applications, such as the integration of AlN as a piezoelectric in MEMS and SAW applications, decreased Q [5–7] – spoiling of MEMS devices, and enhanced friction in tribological coatings.”