Thin film bulk wave acoustic resonators (FBAR) for wireless applications
By Richard C. Ruby, P. Bradley, Y. Oshmyansky, A. Chien, J. D. Larson. 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263), 2001
330 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Condensed Matter Physics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/c9de712bb6c3efbe8bca52ced35208b66aff1268
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Citations in the corpus
- Etch rates for micromachining processing-Part II (2003, unknown): “TiN is used as an adhesion layer.”
- MEMS technology for timing and frequency control (2005, background): “For example, the piezoelectric thin-film bulk acoustic resonators (FBAR’s) [13][14] that have already become a successful high volume product in the wireless handset arena, although small, are perhaps not suitable for circuit design, since their frequencies are governed almost entirely by thickness,”
- MEMS technology for timing and frequency control (2005, background): “For example, the piezoelectric FBARs [17], [18] that have already become a successful highvolume product in the wireless handset arena, although small, are perhaps not suitable for circuit design, since their frequencies are governed almost entirely by thickness, which is not a parameter that can be”
- Micromachined acoustic resonant mass sensor (2005, methodology): “Though some spurious lateral-wave resonances will be generated when the lateral dimension is comparable to the thickness, the lateral resonances can be minimized through an appropriate design of the FBAR’s top-view shape [ 15 ].”
- Bulk acoustic wave RF technology (2008, background): “This leaves the membrane supported at the edges over a shallow “swimming pool” (∼2–4 μm deep and ∼100–300 μm in width and length) [9] in the silicon wafer.”
- Series-resonant VHF micromechanical resonator reference oscillators (2004, background): “In particular, the on-chip electrical resonators provided by conventional integrated circuit (IC) technologies, such as spiral tanks and active biquads, generally post s no larger than 10 [3] in the frequency range of interest.”