Micromachined acoustic resonant mass sensor

By Hao F. Zhang, E. S. Kim. 2005

138 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/150ca284ab6ff42a63b945d78d75931552bc31ba