Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators

By Kam K. Leang, Santosh Devasia. IEEE Transactions on Control Systems Technology, 2007

385 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/934c9f27948e0e18cf46edffcd502a95f9c1c9a8

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In Atomic and Molecular Physics, and Optics

In Control and Systems Engineering

In Materials Chemistry

Citations in the corpus

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “In [34], [35], notch filters were designed to damp the resonant modes.”
A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages (2010, background): “Feedforward inputs can be used to improve the bandwidth of a closed-loop system by bypassing the tracking controller or inverting dynamics [26], [34], [35].”
A New Scanning Method for Fast Atomic Force Microscopy (2011, methodology): “In [12], a proportional-plus-derivative (PD) high-gain feedback controller and a feedforward input were used to compensate for creep, hysteresis, and vibration effects in an AFM piezoactuator system.”
Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner (2012, background): “The board is designed to accommodate feedforward inputs u1 , u2 , and uff , for implementing integrated controllers [28].”
An Analytical Generalized Prandtl–Ishlinskii Model Inversion for Hysteresis Compensation in Micropositioning Control (2011, methodology): “These include: the Preisach model [4], the Krasnosel’skii–Pokrovskii model [6], [7], the Prandtl–Ishlinskii model [ 3 ], and Duhem model [28].”
Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, background): “To obtain a reducedorder model, it is worthy of mentioning that the maximum frequency of tracking trajectories addressed in the paper is around 100 Hz, which is generally true in industrial applications [28], [44].”
Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, background): “At this point in the discussion, it should be noted that feedforward control can be employed to improve the performance of feedback-controlled nanopositioning systems [27]–[29].”