Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner

By Brian J. Kenton, Kam K. Leang. IEEE/ASME transactions on mechatronics, 2012

361 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/1729cdee00c0ed8e75629128da885f7908cec38c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Han Ding
2. Chun-Yi Su
3. Guoying Gu
4. Limin Zhu

In Control and Systems Engineering

1. Limin Zhu
2. Guoying Gu
3. Han Ding
4. Chun-Yi Su
5. Mou Chen
6. Shuzhi Sam Ge
7. Thanh Nho Do
8. Vahid Hassani

Citations in the corpus

• Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, background): “A LONG with the rapid development of nanoscience and nanotechnology, piezoelectric positioning stages are becoming more and more popular for nanometer or subnanometer displacement resolution in many industrial applications [1]–[5], including atomic force microscopes, scanning tunneling microscopes, ”
• Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators With a Modified Prandtl–Ishlinskii Model (2014, background): “Due to the excellent advantages of large output force, high bandwidth, and fast response time, piezoceramic actuators (PCAs) made of piezoelectric materials have been widely used for a long time in nanopositioning applications [1]–[4] such as scanning probe microscopes, nanoimprint equipment, and mi”