A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages

By Andrew J. Fleming, Sumeet S. Aphale, S. O. Reza Moheimani. IEEE transactions on nanotechnology, 2010

182 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/6299182804de55dd19e6a74e2948d7ee91355213

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Han Ding
2. Andrew J. Fleming
3. Chun-Yi Su
4. Guoying Gu
5. Limin Zhu
6. Sergej Fatikow

In Control and Systems Engineering

1. Limin Zhu
2. Guoying Gu
3. Han Ding
4. Sergej Fatikow
5. Andrew J. Fleming
6. Chun-Yi Su
7. Mou Chen
8. Shuzhi Sam Ge

In Mechanical Engineering

1. Limin Zhu
2. Han Ding
3. Chun-Yi Su
4. Guoying Gu
5. Sergej Fatikow
6. Andrew J. Fleming
7. Qizhi Xie
8. S. O. Reza Moheimani

Citations in the corpus

• Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “In the literature, positive position or velocity feedback [57], [190], polynomial-based controller [190], delayed resonant control [191] and integral resonant control [149] have been developed.”
• Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, methodology): “A number of techniques for damping control have been demonstrated successfully in the literature, these include positive position feedback (PPF) [21], polynomial based control [20], shunt control [22], [23], resonant control [24], and integral resonant control (IRC) [19], [25], [26].”