A review of nanometer resolution position sensors: Operation and performance

By Andrew J. Fleming. 2013

392 citations recorded by the source corpus.

Subfields: Computer Networks and Communications, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/51685b19742c8da1fdc96a95df27230993845060

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Computer Networks and Communications

1. Han Ding
2. Chun-Yi Su
3. Guoying Gu
4. Limin Zhu
5. Sergej Fatikow

In Electrical and Electronic Engineering

1. Han Ding
2. Chun-Yi Su
3. Guoying Gu
4. Limin Zhu
5. Sergej Fatikow

In Mechanical Engineering

1. Limin Zhu
2. Han Ding
3. Chun-Yi Su
4. Guoying Gu
5. Sergej Fatikow
6. Qizhi Xie

Citations in the corpus

• Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, methodology): “sensors [28] is utilized to measure the real-time displacement of the mechanism and the signal conditioner is used to convert the sensor's signals to low-voltage signals for the control systems; 5) the control algorithms are developed and implemented in the real-time control board to produce control”