High-Q UHF micromechanical radial-contour mode disk resonators

By J.R. Clark, W. Hsu, Mohamed A. Abdelmoneum, C. T. Nguyen. Journal of microelectromechanical systems, 2005

288 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8f9244568f6d7cb7ffe8e323ec162f8fcd708f5e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. A. Schliesser
2. Dmitry Strekalov
3. Andrey Matsko
4. G. Anetsberger
5. Wen Chen
6. Eldwin Jiaqiang Ng
7. André Xuereb
8. Jinghui Xu

In Biomedical Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Andrey Matsko
4. Jinghui Xu
5. Guoqiang Wu

In Electrical and Electronic Engineering

1. A. Schliesser
2. Dmitry Strekalov
3. Andrey Matsko
4. G. Anetsberger
5. Wen Chen
6. Eldwin Jiaqiang Ng
7. Jinghui Xu
8. Guoqiang Wu

Citations in the corpus

• Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range (2008, methodology): “In this sense, the 3-port configuration used minimizes this effect resulting in an increase in the phase shift φ2 [ 14 ].”
• High-sensitivity monitoring of micromechanical vibration using optical whispering gallery mode resonators (2008, methodology): “An equivalent mode has been studied in a microdisk structure [60] where it was termed radial contour mode.”
• MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “The process can also be modified to realize lateral capacitive gaps for the laterally vibrating MEMS resonators, as described in details in [61], [63], [123].”