Stemless wine-glass-mode disk micromechanical resonators
By Mohamed A. Abdelmoneum, Jing Wang, M. U. Demirci, C. T. Nguyen. The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE, 2003
137 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/6c48f4d72174a49c62e1fbb8198e3e00a5301723
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In Atomic and Molecular Physics, and Optics
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Citations in the corpus
- MEMS technology for timing and frequency control (2005, background): “However, a lower frequency reference oscillator based on a 61-MHz wine-glass-mode disk resonator (row 3 of Table 1 [17]) was recently published that consumed 350μW of power towards phase noise marks at 1kHz and far-fromcarrier offsets of -110 and -132 dBc/Hz, respectively [9].”
- High-Q UHF micromechanical radial-contour mode disk resonators (2005, background): “Index Terms—Electromechanical coupling, microelectromechanical systems (MEMS), microelectromechanical devices, microresonator, quality factor, resonator, UHF, VHF. NOMENCLATURE Empirical scaling factor for simplified resonance frequency calculations (dependent on the mode number).”
- MEMS technology for timing and frequency control (2005, background): “3 Wine-Glass Disk [21]: Disk vibrating in the com-”
- Series-resonant VHF micromechanical resonator reference oscillators (2004, background): “In particular, the on-chip electrical resonators provided by conventional integrated circuit (IC) technologies, such as spiral tanks and active biquads, generally post s no larger than 10 [3] in the frequency range of interest.”
- Temperature Dependence of Quality Factor in MEMS Resonators (2006, unknown): “Some preliminary experiments have shown that by placing anchors at nodal points, anchor loss can be minimized; thus, designing resonators to have a symmetric mode shape and placing anchor points at the nodes can reduce the anchor loss [24].”