International Technology Roadmap for Semiconductors 2003の要求清浄度について - シリコンウエハ表面と雰囲気環境に要求される清浄度, 分析方法の現状について -

By 裕幸 飯田, 菊男 竹田, 武利 藤本. 2004

1,636 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics

View Paper: https://www.semanticscholar.org/paper/12237ddac2abbbee8a8beb6d7a0f644142406ba9

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In Atomic and Molecular Physics, and Optics

  1. Kaustav Banerjee
  2. Igor L. Markov
  3. Yasin Khatami
  4. James D. Meindl
  5. Rui Huang
  6. A. Naeemi

Citations in the corpus