A traction stress sensor array for use in high-resolution robotic tactile imaging

By B. J. Kane, Mark R. Cutkosky, Gregory T. A. Kovacs. Journal of microelectromechanical systems, 2000

246 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/0d3f210fd541d2dd96c42ea19eb890e2ff5a3841

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In Biomedical Engineering

In Control and Systems Engineering

Citations in the corpus

Tactile Sensing—From Humans to Humanoids (2010, methodology): “MOS transistor associated with each transducer [172], [209].”
Flexible Tactile Sensing Based on Piezoresistive Composites: A Review (2014, background): “To overcome the fragility issue, several authors have reported the embedding of strain gauges in polymeric flexible substrates [56,57] or covering the strain gauges with a protective polymeric layer [58].”
Polymer micromachined multimodal tactile sensors (2005, background): “Several groups have embedded silicon sensing elements in polymer skins [26,27], or covered silicon-based devices in a protective polymer layer [14,17,19].”
Interdigital sensors and transducers (2004, background): “This concept has been pursued in a variety of applications, including robotics, biomedical devices, and wearable sensing [185], [186].”
Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications (2005, methodology): “In this paper we present the design and fabrication o silicon microsensor that we have developed for the spe prosthetic purpose but that can be applied in other me applications where the keyword requirements are threeforce measurement and miniaturization.”
Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors (2008, methodology): “Most of the previous three-axis sensors have been fabricated using silicon microelectromechanical systems (MEMS) technology [2]–[4].”
Tactile sensing in intelligent robotic manipulation - a review (2005, background): “The yearly number of published papers had steadily increased, an increase that has continued since then and which is exemplified by the development of novel tactile arrays manufactured in a silicon processes ( Kane et al. , 2000”
A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment (2006, methodology): “A piezoresistive sensing mechanism uses strain gauge to measure deformation of a tactile cell [11]–[15].”
Review: Semiconductor Piezoresistance for Microsystems (2009, methodology): “Since then, CMOS circuitry has been integrated with piezoresistive MEMS devices, such as AFM [63], [195], [205], [216], [219], [305]–[307] and force or stress sensors [59], [61], [68], [290], [292], [294], [308]–[310].”