A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment

By Hyung-Kew Lee, Sun-Il Chang, Euisik Yoon. Journal of microelectromechanical systems, 2006

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Tactile Sensing—From Humans to Humanoids (2010, background): “979 MEMS-based tactile sensors generally use a capacitive [4], 980 [6], [173], [200], [204], [205] or piezoresistive [172], [177], 981 [206] mode of transduction.”
Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors (2008, background): “using this customized planarization stage [7].”
Graphene oxide as high-performance dielectric materials for capacitive pressure sensors (2017, background): “6 102 times higher than that of air gap [39], 4 times higher than that of a PDMS-coated layer [40], and higher than the sensitivity of a structured PDMS layer (0.”
A flexible capacitive tactile sensing array with floating electrodes (2009, background): “PDMS layers can easily be fabricated by the soft lithographic process [17].”