Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS

By Jian Zhang, K. L. Tan, G. Hong, L. Yang, H. Gong. 2001

252 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/f5154e980b3d908e405f148e0806829826b1abe7

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Bioengineering

1. Ellis Meng
2. Brian J. Kim

In Biomedical Engineering

1. Brian J. Kim
2. Ellis Meng
3. Aaron J. Fleischman
4. A. Mata
5. Shuvo Roy
6. Jung-Hwan Park

Citations in the corpus

• Review of polymer MEMS micromachining (2015, methodology): “5 Physical methods such as water jetting [32], pyrolysis [33], and excimer laser patterning [176] can also be used to remove SU-8.”
• A new masking technology for deep glass etching and its microfluidic application (2004, methodology): “[19] J.”
• Fabrication of multi-layer SU-8 microstructures (2006, background): “In addition to exposure nonuniformities, components of the developing step also play an important role in the processing of SU-8 microstructures [25, 30, 32, 40].”
• Multidirectional UV Lithography for Complex 3-D MEMS Structures (2006, background): “Very high-aspect-ratio microstructures have been implemented from SU-8 photoresist (PR) using UV or near-UV light sources [4]–[7].”