Review of polymer MEMS micromachining

By Brian J. Kim, Ellis Meng. 2015

141 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Cellular and Molecular Neuroscience

View Paper: https://www.semanticscholar.org/paper/93b699a4ff5a51a1dac4b96af7f46e8b706af2c4