Multidirectional UV Lithography for Complex 3-D MEMS Structures

By Y. Yoon, Jung-Hwan Park, Mark G. Allen. Journal of microelectromechanical systems, 2006

156 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/99e1e06225b7de11ae5c1afc734a8f58b78a9362

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Brian J. Kim
2. Ellis Meng

In Surfaces, Coatings and Films

1. Ellis Meng
2. Brian J. Kim

Citations in the corpus

• Review of polymer MEMS micromachining (2015, methodology): “For a more thorough review on the backside exposure technique for SU-8, the reader is referred to [28].”
• Microneedles for drug and vaccine delivery (2012, unknown): “Images were reproduced with permission from references (a) [39], (b) [342], (c) [59], (d) [343], (e) [311], (f) [53], (g) [67],”