1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support

By Jing Wang, J. E. Butler, T. Feygelson, C. T. Nguyen. 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004

174 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c8cc7416067e0e797d1d5a5171bba2e25a4331be

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Effect of phonon interactions on limiting the f.Q product of micromechanical resonators (2009, background): “The highest f.Q product reported for Si and diamond resonators is presented in [18] and [19].”
Micromechanical "hollow-disk" ring resonators (2004, background): “If the resonator and anchor materials are identical, then direct attachment of the anchor (or stem) to the resonator constitutes a nearly perfect impedance match (i.e., a perfect energy transfer path) at the resonator-anchor interface [ 4 ], and this only exacerbates the loss issues.”
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance (2003, methodology): “This method for -reduction is superior to methods based on scaling of electrode-to-resonator gaps or dc-bias increases, because it allows a reduction in without sacrificing linearity [10], and thereby breaks the versus dynamic range tradeoff associated with “brute force” scaling.”
One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing (2007, background): “Electrostatic and piezoelectric transduction mechanisms have emerged [3, 4] as the preeminent techniques for driving and sensing resonant vibrations in micromechanical structures.”
A review of MEMS oscillators for frequency reference and timing applications (2011, unknown): “with different acoustic impedance [145].”
Elastic PMLs for resonator anchor loss simulation (2005, methodology): “To exercise and test our proposed methods we examine in detail the response of several radial disk resonators which have been fabricated recently [34, 33 , 11].”
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators (2006, background): “Several electrostatically transduced micromechanical resonators have been demonstrated in the very-high- and ultra-high-frequency spectra [1]–[4]; despite their sheer high Q on the order of 10 000, they exhibit large values of motional resistance (hundreds of k ), which ultimately complicates the in”