One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing

By Gianluca Piazza, Philip Stephanou, A. Pisano. 2007

153 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a1811c3f48107dce33132ffc83789d7c84782bb6