Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

By Roya Maboudian, W. Ashurst, Carlo Carraro. 2000

340 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/c3412405e6de48d2acb34eaac695f7cfe355f37c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Nathan D. Masters
2. Larry L. Howell
3. W. V. Spengen
4. Roya Maboudian
5. W. Ashurst
6. George M. Whitesides
7. Makoto Ohsaki
8. Shinji Nishiwaki

In Electrical and Electronic Engineering

1. Nathan D. Masters
2. Larry L. Howell
3. W. V. Spengen
4. Roya Maboudian
5. W. Ashurst
6. George M. Whitesides
7. Eric M. Yeatman
8. Carlo Carraro

In Mechanics of Materials

1. Nathan D. Masters
2. Larry L. Howell
3. W. V. Spengen

Citations in the corpus

• Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS (2001, background): “A more complete description of this system can be found in [ 12 ].”
• A self-retracting fully compliant bistable micromechanism (2003, methodology): “Several methods have been developed to minimize stiction including Self Assembling Monolayers (SAM) coatings of organic, hydrophobic chemicals [40, 1, 30], and supercritical carbon dioxide drying.”
• Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer (2001, background): “approach is developed instead of an aspiration approach [17].”
• MEMS reliability from a failure mechanisms perspective (2003, background): “The reproducibility and reliability of these coatings is still an important issue [20,21].”
• Surface tension-powered self-assembly of microstructures - the state-of-the-art (2003, methodology): “We first use virtual work to show that the surface curvature causes a pressure difference(the Laplace pressure) between the liquid and the vapor [1].”