MEMS reliability from a failure mechanisms perspective

By W. V. Spengen. Microelectronics and reliability, 2003

309 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0e32a197b5b3822a93ff649bbe102dbb95e1fbe5