Next generation ferroelectric materials for semiconductor process integration and their applications

By Thomas Mikolajick, Stefan Slesazeck, H. Mulaosmanovic, Min Hyuk Park, S. Fichtner, P. Lomenzo, Michael J. Hoffmann, Uwe Schroeder. Journal of Applied Physics, 2021

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Ferroelectrics are a class of materials that possess a variety of interactions between electrical, mechanical, and thermal properties that have enabled a wealth of functionalities. To realize integrated systems, the integration of these functionalities into semiconductor processes is necessary. To this end, the complexity of well-known ferroelectric materials, e.g., the perovskite class, causes severe issues that limit its applications in integrated systems. The discovery of ferroelectricity in hafnium oxide-based materials brought a renewed interest into this field during the last decade. Very recently, ferroelectricity was also verified in aluminum scandium nitride extending the potential of seeing a wealth of ferroelectric functions in integrated electronics in the future. This paper discusses the prospects of both material systems in various applications.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/bdca2815fb9938b4a46ac6254a1aaf2b857a97ad