Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model

By Kevin K. Lee, D. Lim, H. Luan, Anuradha Murthy Agarwal, J. Foresi, Lionel C. Kimerling. 2000

449 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a2c6c91633713ff86ae855694ab36a5ab161d4ab

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Lionel C. Kimerling
2. Michal Lipson

In Electrical and Electronic Engineering

1. Michal Lipson
2. Lionel C. Kimerling
3. S. Spector
4. Daniel K. Sparacin
5. Volker J. Sorger

Citations in the corpus

• Fabrication of add-drop filters based on frequency-matched microring resonators (2006, background): “The achieved sidewall smoothness is among the best reported [16], [17].”
• Silicon Photonics: The Next Fabless Semiconductor Industry (2013, unknown): “It took several years of work to reduce the losses of these submicron waveguides to acceptable levels, since the strong interaction of the optical fields with the sidewalls can lead to substantial losses, driven by roughness [28].”
• Recent progress in lasers on silicon (2010, unknown): “Further loss-reduction in Si waveguides by oxidatio”
• Silicon waveguide sidewall smoothing by wet chemical oxidation (2005, methodology): “Si waveguides, like all high ∆n waveguides, exhibit transmission scattering loss from interface imperfections associated with fabrication [7], [12].”
• Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides (2005, unknown): “This approach was used in [9].”