Silicon waveguide sidewall smoothing by wet chemical oxidation

By Daniel K. Sparacin, S. Spector, Lionel C. Kimerling. Journal of Lightwave Technology, 2005

197 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/efeed8877188c8ec833bbc248a2b4fbdc9428a2e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Jürgen Michel

In Electrical and Electronic Engineering

1. Jürgen Michel
2. Lionel C. Kimerling
3. Young-Kai Chen

Citations in the corpus

• Demonstration of a Tunable Microwave-Photonic Notch Filter Using Low-Loss Silicon Ring Resonators (2009, background): “Additionally, they have shown that the loss can be reduced by widening the waveguide width; see also [5].”