Electrostatic correction of structural imperfections present in a microring gyroscope

By B. Gallacher, John Hedley, J. Burdess, A. Harris, A. Rickard, D. King. Journal of microelectromechanical systems, 2005

160 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d54bb732671e8dbe95aac8f3abe02e82cbf14c76

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1. Ahmed Emira
2. Ahmed K. S. Abdel Aziz
3. K. Khirallah
4. Amro M. Elshurafa
5. Hani H. Tawfik
6. Sherif Sedky

Citations in the corpus

• Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators (2011, background): “In the case of gyroscopes and for the purposes of matching the senseand drive-mode oscillations, spring softening is considered advantageous because it can tune the sense frequency to match the drive frequency given the inevitable fabrication imperfections [7], [8].”