Top-gated graphene field-effect-transistors formed by decomposition of SiC

By Yanqing Wu, Peide D. Ye, M. Capano, Yi Xuan, Y. Sui, Minghao Qi, James A. Cooper, T. Shen, Deepak Pandey, G. Prakash and 1 more. 2008

219 citations recorded by the source corpus.

Top-gated, few-layer graphene field-effect transistors (FETs) fabricated on thermally decomposed semi-insulating 4H-SiC substrates are demonstrated. Physical vapor deposited SiO2 is used as the gate dielectric. A two-dimensional hexagonal arrangement of carbon atoms with the correct lattice vectors, observed by high-resolution scanning tunneling microscopy, confirms the formation of multiple graphene layers on top of the SiC substrates. The observation of n-type and p-type transition further verifies Dirac Fermions’ unique transport properties in graphene layers. The measured electron and hole mobilities on these fabricated graphene FETs are as high as 5400 and 4400cm2∕Vs, respectively, which are much larger than the corresponding values from conventional SiC or silicon.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/08607c0e8661d8c2a9f56c61282429797c45bd80

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In Materials Chemistry

  1. A. Mahmood
  2. E. Dujardin
  3. C. Soldano
  4. T. Iakimov
  5. T. Echtermeyer
  6. L. Hultman
  7. A.K. Geim
  8. K. Novoselov

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