Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

By Jaesung Park, L. Chu, A. Oliver, Yogesh B. Gianchandani. 2001

167 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b09fceae3f489078569fe0baa1085efe06401bff

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Yogesh B. Gianchandani
2. Jaesung Park
3. Larry L. Howell

In Electrical and Electronic Engineering

1. Yogesh B. Gianchandani
2. Jaesung Park
3. Larry L. Howell

Citations in the corpus

• Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator (2002, methodology): “[7] employ bent-beam actuators to drive both rotary displacement devices and long-throw linear inchworm mechanisms.”
• Electrothermal properties and modeling of polysilicon microthermal actuators (2003, methodology): “Examples of applications in microelectromechanical systems (MEMS) utilizing electrothermal actuation include: linear and rotary microengines [ 4 ]; in plane and out of plane actuators for optical switching, scanning, and mirror arrays [5]‐[7]; and gripper actuation for microassembly operations [8].”
• Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices (2001, methodology): “An accompanying article that follows this one describes the use of bent-beam actuators in rotary and rectilinear microengines [28].”