Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator

By Christian D. Lott, Timothy W. McLain, John N. Harb, Larry L. Howell. 2002

208 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/7603312a0681c788dd89c46c7fd4f3f880add8dc

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1. Eniko T. Enikov
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3. S. Kedar

Citations in the corpus

• Analytical model for analysis and design of V-shaped thermal microactuators (2005, methodology): “steady-state temperature distribution can be derived from energy balance considerations as reported by [ 28 ]”