Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
By L. Que, Jaesung Park, Yogesh B. Gianchandani. 2001
377 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/607d1de6625cd1ce0997fbf009de6a219b8db732
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Bent-beam electrothermal actuators-Part II: Linear and rotary microengines (2001, background): “In the preceding article [1] it was established that single beam actuators are capable of nonresonant, rectilinear displacements in the m range, and offer peak forces in the 1 mN range, whereas cascaded devices offer 2–4 higher displacement and about 10 lower peak forces.”
- Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization (2007, neutral): “As a result of the voltage applied across the inclined beams (V-shaped beams), the actuator shuttle moves forward [17].”
- Analytical model for analysis and design of V-shaped thermal microactuators (2005, background): “The heat transfer portion of the problem has been solved analytically by many in the MEMS literature [9], [19], [ 24 ], [30], [31].”