Electrothermal properties and modeling of polysilicon microthermal actuators

By A. Geisberger, N. Sarkar, M. Ellis, G. Skidmore. 2003

169 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/f8c0a8f51620b83ccaff2d12b29a27e28aca8d42

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Citations in the corpus

• Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization (2007, unknown): “This is consistent with observations reported in the literature for similar thermal actuators [12], [24].”
• A bulk-micromachined bistable relay with U-shaped thermal actuators (2005, methodology): “Electrothermal actuators are commonly used in MEMS [9]–[12].”