Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition

By Kyoung-Jin Kim, Min Hyuk Park, Hyun-Jib Kim, Yae Jean Kim, Tae-Houng Moon, Youngsill Lee, Soonsil Hyun, Taehong Gwon, C. S. Hwang. 2016

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