Engineering chemically abrupt high-k metal oxide∕silicon interfaces using an oxygen-gettering metal overlayer

By Hyoungsub Kim, Paul C. McIntyre, C. O. Chui, Krishna C. Saraswat, Susanne Stemmer. 2004

200 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/985b1b5532a05030ba6fdd329665a97802305910

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In Electrical and Electronic Engineering

  1. Daniele Ielmini
  2. Shimeng Yu

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