Metrology in a scanning electron microscope: theoretical developments and experimental validation

By Michael A. Sutton, Ning Li, D. Garcia, N. Cornille, Jean-José Orteu, S. Mcneill, H. Schreier, Xiaodong Li. 2006

172 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Computer Vision and Pattern Recognition, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/958629681dd6a6faa7a81db0485175d25f9ea4bb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

  1. Tresa M. Pollock
  2. J. Stinville
  3. M. Echlin
  4. Philippe Bocher
  5. F. Bridier
  6. D. Texier
  7. A. D. Kammers
  8. Samantha Daly

In Computer Vision and Pattern Recognition

  1. Tresa M. Pollock
  2. J. Stinville
  3. M. Echlin
  4. A. D. Kammers
  5. Samantha Daly

In Mechanical Engineering

  1. J. Stinville
  2. M. Echlin
  3. A. D. Kammers
  4. Samantha Daly
  5. Tresa M. Pollock

Citations in the corpus