Foundations of MEMS

By Chang Liu. 2006

503 citations recorded by the source corpus.

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What is the Young's Modulus of Silicon? (2010, background): “While many leading textbooks provide summaries of the material presented here [1]–[3], many others provide oversimplified or incomplete information.”
Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity (2007, background): “On the other hand, a quadratic relationship is expected under dc flow.”
Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading (2012, unknown): “[24]”