A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout

By F. Battiston, J. Ramseyer, H. Lang, Marko Klaus Baller, C. Gerber, J. Gimzewski, E. Meyer, H. Güntherodt. 2001

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Micromachined acoustic resonant mass sensor (2005, methodology): “A resonant mass sensor based on microcantilever’s flexural vibration [ 2 ], for example, has been developed to detect various chemical and biological agents.”
Nanotechnology for Early Cancer Detection (2010, background): “Microfabricated cantilevers bend according to changes in the environment or changes on their surfaces, and this bending is in the nanometer-scale [108,109].”
Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor (2005, background): “(1 afer; (2) patterning; (3) DeepRIE etching; (4) photo resist removing 5) wet release etching of buried silicon oxide.”
Submersible Printed Split-Ring Resonator-Based Sensor for Thin-Film Detection and Permittivity Characterization (2016, methodology): “applications of SRR-based sensors [9], [10].”
Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. (2007, methodology): “For our initial demonstration we use polymethyl methacrylate (PMMA”