Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor

By Wenhua Zhang, Kimberly L. Turner. 2005

201 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/33ffb47c9dbe882ff5838e1fda25fc14bd26b125

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Kimberly L. Turner
2. Jeffrey F. Rhoads
3. Steven W. Shaw
4. B. Ilic
5. Slava Krylov
6. Stella Lulinsky

In Electrical and Electronic Engineering

1. Kimberly L. Turner
2. Jeffrey F. Rhoads
3. Steven W. Shaw
4. B. Ilic
5. Slava Krylov
6. Stella Lulinsky

Citations in the corpus

• Bistability of curved microbeams actuated by fringing electrostatic fields (2011, background): “In (interdigitated or non-interdigitated [ 30 ]) comb-drive transducers, electrostatic forces may contribute to the increase of the system effective stiffness.”
• Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “[161], Requa and Turner [162, 163] built a selfsensing mass sensor based on parametric resonance (see Fig.”