Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications.

By Mo Li, Hong X. Tang, Michael L. Roukes. Nature Nanotechnology, 2007

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Progress in the production and modification of PVDF membranes (2011, background): “The same group later reported nanoscale silicon carbide (SiC) cantilevers with piezoresistive gold films for very high-frequency (VHF) applications in Scanning Probe Microscopy (SPM) [234].”
Mechanical systems in the quantum regime (2011, methodology): “Opt. cav. 4.0 · 10−4 4.5 ·10−3 0.62 [33] 7 Opt. cav. 100 38 7.2 [34] 8 Opt. cav. [35] 9 Opt. cav. 4.0 · 10−4 4.5 ·10−3 0.62 [36] 10 Opt. cav. 3.0 · 10−3 0.53 5.4 [37] 11 Piezoresist. 39 1.8 · 104 506 [38] 12 Opt. cav. 0.2 0.06 8.3 [39] 13 Opt. cav. 0.03 9.5 ·10−4 0.04 [40] 14 Opt. cav. 1.0 ·103 2.8 ”
Dissipation in nanoelectromechanical systems (2014, methodology): “Effective actuation techniques that are not discussed here include the piezoresistive detection method [87,88] and electrothermal actuation [100].”
Review: Semiconductor Piezoresistance for Microsystems (2009, background): “The same group later reported nanoscale silicon carbide (SiC) cantilevers with piezoresistive gold films for very high-frequency (VHF) applications in Scanning Probe Microscopy (SPM) [234].”
Comparative advantages of mechanical biosensors (2011, background): “Recent work shows these difficulties become exacerbated with semiconducting transducers as their size is scaled downwards, but can be overcome through the use of metallic piezoresistor”