Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS

By S. De, N. Aluru. Journal of microelectromechanical systems, 2004

153 citations recorded by the source corpus.

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Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation (2007, methodology): “In addition, the multiple resonant peaks observed under a square signal can be used for MEM multiple band filters or passband filters [28].”
Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “Electrostatic force Parallel plate [93, 94] [90, 91] [95, 96] [12, 67, 16, 71] [15, 70, 84] — (cntd) [92, 60] [28, 97] [73, 76, 77] [86, 83, 85] Fringing fields [18, 78, 82, 23] [65, 72, 43] 3D analysis [25, 39] [87–89] [63, 74] [64]”
Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators (2011, result): “The authors in [20] provide a numerical approach for studying hardening and softening but compare their solution to previously published results possessing small oscillation amplitudes where the nonlinearity was not observed.”
Vibration and shock reliability of MEMS: modeling and experimental validation (2011, unknown): “For an electrostatic MEMS device, the effective spring constant decreases with increased voltage; this is the electrostatic spring softening, as described in [17].”
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, background): “De and Aluru [31] describe a systematic Lagrangian approach to modeling electromechanical devices with dynamic interactions.”