Inverters With Strained Si Nanowire Complementary Tunnel Field-Effect Transistors

By Lars Knoll, Qing-Tai Zhao, A. Nichau, S. Trellenkamp, S. Richter, A. Schäfer, David Esseni, Luca Selmi, K. Bourdelle, S. Mantl. IEEE Electron Device Letters, 2013

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Inverters based on uniaxially tensile strained Si (sSi) nanowire (NW) tunneling field-effect transistors (TFETs) are fabricated. Tilted dopant implantation using the gate as a shadow mask allows self-aligned formation of p-i-n TFETs. The steep junctions formed by dopant segregation at low temperatures improve the band-to-band tunneling, resulting in higher on-currents of n- and p-TFETs of > 10 μA/μm at VDS=0.5 V. The subthreshold slope for n-channel TFETs reaches a minimum value of 30 mV/dec, and is <; 60 mV/dec over one order of magnitude of drain current. The first sSi NW complementary TFET inverters show sharp transitions and fairly high static gain even at very lowVDD=0.2 V. The first transient response analysis of the inverters shows clear output voltage overshoots and a fall time of 2 ns at VDD=1.0 V.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6ac0154062900ca5c791b4ec09bf001720e91124

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