A methodology for determining mechanical properties of freestanding thin films and MEMS materials

By Horacio Espinosa, Barton C. Prorok, M. Fischer. 2003

348 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5eba4c0621549ec55d8e1b874a28865e74ca1d05

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Horacio Espinosa
2. M. Saif
3. M. Aman Haque
4. B. Peng
5. Barton C. Prorok
6. V. Giessen
7. John L. Volakis
8. L. Nicola

In Electrical and Electronic Engineering

1. Zhigang Suo
2. Nanshu Lu
3. Horacio Espinosa
4. M. Saif
5. M. Aman Haque
6. B. Peng
7. J. Vlassak
8. Barton C. Prorok

In Mechanics of Materials

1. Zhigang Suo
2. J. Vlassak
3. Nanshu Lu
4. Sam Zhang
5. Horacio Espinosa
6. M. Saif
7. M. Aman Haque
8. Y. Xiang

Citations in the corpus

• Plastic deformation of freestanding thin films: Experiments and modeling (2006, background): “…the mechanical properties of thin films by a variety of techniques, e.g. (Vlassak and Nix, 1992; Shen et al., 1998; Hommel and Kraft, 2001; Espinosa et al., 2003, 2004; Dehm et al., 2003; Lou et al., 2003; Phillips et al., 2004; Florando and Nix, 2005; Xiang et al., 2005), and to modeling…”
• The effect of film thickness on the failure strain of polymer-supported metal films (2010, background): “[12] Espinosa HD, Prorok BC, Fischer M.”
• Delocalizing strain in a thin metal film on a polymer substrate (2005, background): “A freestanding polycrystalline thin metal film may strain somewhat beyond the elastic limit (Xiang et al., 2002; Espinosa et al., 2003 ).”
• TiNi-based thin films in MEMS applications: a review (2004, methodology): “Some new methods based on MEMS testing [26], such as bulge testing [27], TiNi/Si diaphragm[28,29], cantilever bending or damping [30] are more appropriate for micro-actuator applications, which are compatible with small dimensions and high sensitivities.”
• Effect of nanoscale heating on electrical transport in RF MEMS switch contacts (2005, result): “previously reported estimates between 50–55 GPa for Young’s modulus of microfabricated gold structures, comparing well with our measurement [16]–[18].”
• Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension (2004, positive): “A more detailed description of their fabrication, shape and speciÿc dimensions is given in Espinosa et al. (2003).”
• A review of MEMS-based microscale and nanoscale tensile and bending testing (2003, methodology): “36 However, in this study, we use eqs (4) and ( 5 ) to determine the stress-strain relationship for the 100 nm thick specimen.”